Amirkabir University of Technology Amirkabir Journal of Mechanical Engineering 2008-6032 52 8 2019 03 25 Damping Modeling in Dual Axis Torsion Micro-Actuators Considering the Bending of the Supporting Beams Damping Modeling in Dual Axis Torsion Micro-Actuators Considering the Bending of the Supporting Beams 2161 2176 3353 10.22060/mej.2019.15181.6060 FA Mozhde Khadembashi School of Mechanical Engineering, Ferdowsi University of Mashhad, Mashhad, Iran Journal Article 2018 10 29 Torsional micro-actuators are employed in a variety of applications such as optical switches and biomedical imaging. Squeezed film damping is one of the important energy loss mechanisms in these systems. This kind of damping is a key factor in the performance characterization of micro-electro-mechanical systems and has been paid attention by many researchers. The objective of this paper is modeling the squeeze film air damping in dual axis torsional micro-actuators by considering the bending of the supporting torsion beams. To do so, first, the air inertial effects is neglected compared to its viscosity and the Reynolds equation governing the behavior of trapped air between the actuator and the underneath plate is simplified. The resulting equation is then normalized and solved using the extended Kantorovich method for obtaining the air pressure distribution under the plate. This pressure distribution is then employed for finding the damping force and torques. A parametric study is also carried out to determine the effect of different design parameters on the damping of the system. The results of this paper can be effectively employed for accurate dynamic modeling of dual axis torsional micro-actuators. Torsional micro-actuators are employed in a variety of applications such as optical switches and biomedical imaging. Squeezed film damping is one of the important energy loss mechanisms in these systems. This kind of damping is a key factor in the performance characterization of micro-electro-mechanical systems and has been paid attention by many researchers. The objective of this paper is modeling the squeeze film air damping in dual axis torsional micro-actuators by considering the bending of the supporting torsion beams. To do so, first, the air inertial effects is neglected compared to its viscosity and the Reynolds equation governing the behavior of trapped air between the actuator and the underneath plate is simplified. The resulting equation is then normalized and solved using the extended Kantorovich method for obtaining the air pressure distribution under the plate. This pressure distribution is then employed for finding the damping force and torques. A parametric study is also carried out to determine the effect of different design parameters on the damping of the system. The results of this paper can be effectively employed for accurate dynamic modeling of dual axis torsional micro-actuators. https://mej.aut.ac.ir/article_3353_8b9e7ab295e87570551db122a04c6f7c.pdf