Amirkabir University of Technology Amirkabir Journal of Mechanical Engineering 2008-6032 54 1 2022 03 21 Investigation of Electro-Osmotic Micro-Pumps Using Electrical Field Gradient and Asymmetric Micro-Electrodes: Numerical Modeling and Experimental Validation Investigation of Electro-Osmotic Micro-Pumps Using Electrical Field Gradient and Asymmetric Micro-Electrodes: Numerical Modeling and Experimental Validation 101 122 4547 10.22060/mej.2021.19841.7129 FA Tannaz Tavari SUT Mohsen Nazari Pooria Akbarzadeh SUT Naser Sepehry SUT Mostafa Nazari Department of Mechanical Engineering, Shahrood University of Technology, Shahrood, Iran. Journal Article 2021 04 09 In the present study, in order to fabricate AC electroosmotic micropumps, the improvement of geometrical parameters of the 3D electrode, such as width, height, and location of 3D steps on the base electrodes in one pair, the base electrodes size (symmetric or asymmetric), electrodes gap, and also electrical characteristics including voltage and frequency have been investigated. Also, the fluid flow (KCl) in the channel was analyzed. The governing equations of fluid flow and electrical domain have been solved using the finite element method to investigate the effect of electrode geometry on slip velocity, which affects the fluid flow. In order to validate our numerical simulation, this chip is fabricated by photolithography method such as deposition of platinum electrodes, creating 3D steps on the base electrodes using a polymer, and fabrication of a microchannel. Finally, Our results indicate that an optimal design results in a pump with the width (50 µm) and steps height (5 µm) of each electrode and their displacement (30 µm) are capable of generating a high velocity, flow rate, and pressure around 1.77 mm/s, 14.9 ml/min and 74.6 Pa, respectively at a given voltage (2.5 V) and frequency (1 kHz), which qualitatively matches the trend observed in the experiment. This design provides an improvement in electroosmotic pumping. In the present study, in order to fabricate AC electroosmotic micropumps, the improvement of geometrical parameters of the 3D electrode, such as width, height, and location of 3D steps on the base electrodes in one pair, the base electrodes size (symmetric or asymmetric), electrodes gap, and also electrical characteristics including voltage and frequency have been investigated. Also, the fluid flow (KCl) in the channel was analyzed. The governing equations of fluid flow and electrical domain have been solved using the finite element method to investigate the effect of electrode geometry on slip velocity, which affects the fluid flow. In order to validate our numerical simulation, this chip is fabricated by photolithography method such as deposition of platinum electrodes, creating 3D steps on the base electrodes using a polymer, and fabrication of a microchannel. Finally, Our results indicate that an optimal design results in a pump with the width (50 µm) and steps height (5 µm) of each electrode and their displacement (30 µm) are capable of generating a high velocity, flow rate, and pressure around 1.77 mm/s, 14.9 ml/min and 74.6 Pa, respectively at a given voltage (2.5 V) and frequency (1 kHz), which qualitatively matches the trend observed in the experiment. This design provides an improvement in electroosmotic pumping.

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