عنوان مقاله [English]
In this paper, the sensitivity of micro-cantilever infrared detector has been increased by optimizing its geometric dimension. The detector main body consists of an absorbing area, bi-material and insulator arms, which is made up by silicon dioxide. Bi-material regions (absorbing area and bi-material arms) include a thin film layer of aluminum, which is placed on the main body layer. In this detector, the amount of bending at the end of tip detector depends on the thickness of insulating and metal layers, and the width of insulating and bi-material arms. Furthermore, it has been proved that the detector's displacement and sensitivity are optimized when the thickness of metal layer is selected the half thickness of absorbing layer. The results of the calculations show that by applying boundary conditions for 100 pW/μm2constant thermal flux on the absorber, amount of displacement, thermo mechanical, power, displacement and body temperature sensitivities are increased 26%, 27%, 28%, 2.3% and 26%, respectively. Also, the calculation results show that the sensitivities are improved to 4.24, 54, 12.4, 12.8, 54, 4.2, 54.48 and 54 times, respectively, in the vacuum environment if the arm’s width, the insulating and metal layers thicknesses are selected as 1μm, 0.1μm, and 0.05μm, respectively.