افزایش حساسیت آشکارساز مادون‌قرمز میکروکانتیلیوری از جنس SiO2/Al بر پایه فناوری میکرو ماشین‌کاری با بهینه‌سازی ابعاد طراحی

نوع مقاله : مقاله پژوهشی

نویسندگان

1 گروه برق- الکترونیک- دانشکده برق دانشگاه هوایی شهید ستاری- تهران- ایران

2 گروه مهندسی برق الکترونیک- دانشکده مهندسی برق دانشگاه هوایی شهید ستاری- تهران- ایران

چکیده

در این مقاله، حساسیت آشکارساز مادون‌قرمز میکروکانتیلیور با بهینه‌سازی ابعاد هندسی افزایش می‌یابد. بدنه اصلی آشکارساز از جنس  شامل ناحیه جاذب، بازوهای دوماده‌ای و ایزوله‌کننده است. نواحی دوماده‌ای (ناحیه جاذب و بازوهای دوماده‌ای) شامل یک‌لایه نازک آلومینیوم است که برروی لایه عایق قرارگرفته است. در این آشکارساز، میزان خمش آشکارساز به ضخامت لایه‌ها (عایق و فلز) و عرض بازوها (ایزوله‌کننده و دوماده‌ای) بستگی دارد. همچنین اثبات‌شده است که با انتخاب ضخامت لایه فلز به‌اندازه نصف ضخامت لایه جاذب، میزان جابه‌جایی و حساسیت به حداکثر مقدار خود می‌رسد. نتایج حاصل از محاسبات نشان می‌دهد که با اعمال شرایط مرزی به ازای شار حرارتی ثابت 100 بر روی ناحیه جاذب، میزان جابه‌جایی، حساسیت‌های ترمومکانیکی، توانی، جابه‌جایی و حساسیت به دمای جسم به ترتیب 26%، 27%، 28%،3/2% و 26% نسبت به ابعاد اولیه افزایش می‌یابند. همچنین، چنانچه فرآیند ساخت بهبود یابد و پهنای بازوها، ضخامت لایه عایق و فلزی به ترتیب  μm1، μm0/1 و μm0/05 انتخاب گردند، مقدار دما، میزان جابه‌جایی، ضریب انتقال دما، حساسیت‌های ترمومکانیکی، توانی، دمایی، جابه‌جایی، حساسیت به دمای جسم و ثابت زمانی در محیط خلأ به ترتیب 4/72، 54، 4/12، 12/8، 54، 4/2، 48/54، 54 و 1/5 برابر بهبود می‌یابند.

کلیدواژه‌ها

عنوان مقاله [English]

Increasing the Sensitivity of SiO2/Al Micro Cantilever Infrared Detector Based on Micro Electromechanical Systems Technology by Optimizing of Dimensions

نویسندگان [English]

  • Hassan Abdollahi 1
  • Jalil Mazloum 2
1 Department of Elec Eng, Shahid Sattari Aeronautical University of Science and Technology, Tehran, Iran
2 Department of Electrical Engineering, Shahid Sattari Aeronautical University of Science and Technology, Tehran, Iran
چکیده [English]

In this paper, the sensitivity of the micro-cantilever infrared detector has been increased by optimizing its geometric dimension. The detector's main body consists of an absorbing area, bi-material, and isolation legs, which are made up of silicon dioxide. Bi-material regions (absorbing area and bi-material legs) include a thin film layer of aluminum, which is placed on the main body layer. In this detector, the amount of bending at the end of the tip detector depends on the thickness of insulating and metal layers and the width of isolating and bi-material legs. Furthermore, it has been proved that the detector's displacement and sensitivity are optimized when the thickness of the metal layer is selected the half of the thickness of the absorbing layer. The results of the calculations show that by applying boundary conditions for 100 pW/μm2 constant thermal flux on the absorber, amount of displacement, thermomechanical, power, displacement, and body temperature sensitivities are increased by 26%, 27%, 28%, 2.3%, and 26%, respectively. In addition, the calculation results show that the sensitivities and response time are improved to 4.24, 54, 12.4, 12.8, 54, 4.2, 54.48, 54, and 1.5 times, respectively, in the vacuum environment if the leg’s width, the isolating and metal layers’ thicknesses are selected as 1μm, 0.1μm, and 0.05μm, respectively.

کلیدواژه‌ها [English]

  • Uncooled infrared detector
  • Thermal detector
  • Microcantilever

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نشریه مهندسی مکانیک امیرکبیر
دوره 53، شماره 8
آبان 1400
صفحه 4717-4728

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