تاثیر انحنای میکروتیر و الکترود بر ناپایداری‌های جذب و اسنپ-ترو

نوع مقاله : مقاله پژوهشی

نویسندگان

مهندسی مکانیک، مهندسی، فردوسی مشهد، مشهد، ایران

چکیده

وقوع ناپایداری جذب در سیستم‌های میکروالکترومکانیکی، آ نها را به عنوان سیستم‌هایی آسیب‌پذیر از نظر پایداری معرفی می‌کند. میکروتیرهای منحنی یکی از راه حل‌های پیشنهادی برای افزایش محدوده کاری سیستم می‌باشد. این انحنا سبب وقوع اسنپ-ترو خواهد شد که طی آن میکروتیر با یک ارتعاش دامنه بزرگ به حالت پایدار دوم خود منتقل می‌شود. علی‌رغم مزیت‌های این پدیده، گاهی شروع آن به ناپایداری سیستم ختم خواهد شد. به منظور استفاده از مزایای انحنای سازه و دوری جستن از معایب اسنپ-ترو، در پژوهش حاضر عملکرد سازه دارای الکترود منحنی بررسی شده است. در این راستا معادله دیفرانسیل حاکم با فرض تئوری تیر اولر-برنولی، به کمک اصل همیلتون و بر اساس تئوری تنش-کوپل بهبود یافته به دست آمده است. این معادله با استفاده از روش تجزیه گالرکین به یک معادله دیفرانسیل معمولی غیرخطی تبدیل شده و حل عددی آن توسط نرم‌افزار متلب به دست آمده است. نمودار تغییرات بیشترین خیز میکروتیر در برابر اختلاف پتانسیل رسم شده و مشخصه‌های آغاز ناپایداری هر سیستم محاسبه شده است. نتایج حاصل نشان می­دهد که در نسبت‌های انحنا به گپی که اسنپ-ترو سبب از دست رفتن پایداری میکروتیر منحنی می‌شود، استفاده از الکترود منحنی منجر به پایداری سازه تا موقعیت و ولتاژ بالاتری خواهد شد.

کلیدواژه‌ها

موضوعات

عنوان مقاله [English]

The Effect of Curvature of Microbeam and Electrode on the Snap-Through and Pull- In Instabilities

نویسندگان [English]

  • Ehsan Akrami Nia
  • hamid ekhteraei toussi
Mechanical Engineering, Engineering, Ferdowsi University of Mashhad, Mashhad, Iran
چکیده [English]

Due to the pull-in instability, the sustainability of micro-electro-mechanical systems is vulnerable. One of the proposed mechanism to improve the stability of these systems is the use of curved microbeams. The curvature causes the snap-through phenomenon by which the microbeam moves to its second stable position. Despite the advantages of snap-through, sometimes it leads to unstable conditions. In order to use the merits of curved structure and avoid the snap-through effect, in the present study, the performance of a structure composed of curved electrode is investigated. By assuming the Euler-Bernoulli beam theory and based on the modified couple stress theory, the governing equation is obtained by using Hamilton’s principle. This equation is converted to a nonlinear ordinary differential equation by using the reduced-order model based on Galerkin procedure. The numerical solution is formulated and obtained by using the MATLAB software. The performance of the systems composed of curved microbeam and curved electrode are compared with each other, as well as with the systems made of straight elements. The results show that in cases where snap-through may cause unstable conditions, the use of curved electrode can result in more sustainable behavior in a wider range of position and voltage levels.

کلیدواژه‌ها [English]

  • Micro-electro-mechanical systems
  • Pull-in instability
  • Curved micro-beam
  • Snap-through
  • Curved electrode

مراجع

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نشریه مهندسی مکانیک امیرکبیر
دوره 52، شماره 8
آبان 1399
صفحه 2243-2260

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