طراحی و شبیه‌سازی یک حسگر زیستی براساس آرایه نوسانگرهای میکرو‌الکترومکانیکی

نوع مقاله : مقاله پژوهشی

نویسندگان

گروه الکترونیک - دانشکده برق- دانشگاه صنعتی سهند - تبریز - ایران

چکیده

استفاده از سیستم‌های میکروسیالاتی برای کاربردهای مختلف از جمله آزمایشگاه بر روی تراشه، انتقال دارو و راکتورهای ریزشیمیایی روز به روز در حال افزایش است که برای کنترل و توسعه این ریزسیستم‌ها حسگرهای متعددی ارائه شده‌است. در این مقاله حسگری برپایه سیستم‌های میکروالکترومکانیکی با کاربرد مستقیم در محیط مایع برای سیستم‌های میکروسیالات دیجیتال معرفی می‌گردد که قابلیت اجتماع با سایر مولفه‌های سیالاتی مانند انتقال، جداسازی و ترکیب را نیز داراست. حسگر پیشنهادی از تعدادی میکرونوسانگر همبندی هم‌اندازه تشکیل یافته که به موازات بستر حرکت کرده از این رو قابلیت اجتماع در میان الکترودهای مسطح در میکروسیالات دیجیتال را داراست. ناحیه فعال حسگر در وسط سازه قرار گرفته و برای به دام‌انداختن هدف زیستی ایستا گردیده‌است. به دلیل حرکت در صفحه این حسگر، میرایی سیالاتی در حدی است که ضریب کیفیت قابل قبول در خروجی به دست می‌آید. ساختار پیشنهادی به روش اجزا محدود شبیه‌سازی گردیده و نتایج نشانگر این است که فرکانس مناسب برای حرکت در صفحه سیستم برابر با 5/16 کیلوهرتز است. علاوه بر آن ضریب کیفیت و حساسیت جرمی به ترتیب برابر با 49و 100 هرتز بر میکروگرم بوده که قابل مقایسه با حسگرهایی با کاربرد مشابه سیالاتی است.
 

کلیدواژه‌ها

موضوعات


عنوان مقاله [English]

Design and simulation of a biosensor based on a microelectromechanical resonator array

نویسندگان [English]

  • Mahnaz Mehdipoor
  • Habib Badri Ghavifekr
Electronics Department - Faculty of Electrical Engineering - Sahand University of Technology - Tabriz - Iran
چکیده [English]

The use of microfluidic systems for various applications such as lab-on-chip, drug delivery, and micro chemical reactors is increasing day by day and several sensors have been provided to control and develop these microsystems. In this paper, a biosensor based on microelectromechanical systems was introduced with direct application in liquid environment for digital microfluidic systems that have the ability to be integrated with various fluidics components such as delivery, separation, and mixing. The proposed sensor comprises  semi-sized coupled microresonators which vibrate in parallel to the substrate so that it can be integrated between the plane electrodes in digital microfluidics systems. Active area of the sensor is located in the center of the structure and immobilized for capturing any special biological targets. Due to in-plane vibration of the sensor, the viscous damping is low enough to achieve measurable quality factor by resonator. The total system is simulated by finite element methods and the results demonstrate that the appropriate vibration frequency for in-plane motion of the sensor is 16.5kHz. In addition, the quality factor and mass sensitivity are 49 and
100Hz/µg, respectively, which are comparable to sensors with similar fluidics applications.
 
 

کلیدواژه‌ها [English]

  • Microelectromechanical resonator
  • Digital Microfluidics
  • Biosensor
  • DAMPING
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