تحلیل ناپایداری استاتیکی و دینامیکی پولین نانومحرک‌های دوسر گیردار نیمه متأثر: تأثیر الکترود زیرلایه

نوع مقاله : مقاله پژوهشی

نویسندگان

1 دانشکده مهندسی مکانیک، دانشگاه شهید چمران، اهواز، ایران

2 دانشکده مهندسی مکانیک، دانشگاه آزاد اسلامی، واحد دزفول، دزفول، ایران

چکیده

تحقیقات بسیار زیادی پیرامون مدلسازی ناپایداری‌های سیستم‌های میکرو/نانو الکترومکانیکی با اندازه یکسان دو الکترود متحرک و زیرلایه تاکنون انجام شده است، ولی پژوهشی که مدل سازی ناپایداری پولین استاتیکی و دینامیکی میکرو/نانومحرک‌ها را با وجود الکترود زیرلایه کوتاه‌تر )نیمه متأثر( و با درنظر گرفتن اثرات ابعاد کوچک مورد بررسی قرار بدهد یافت نشده است. در پژوهش حاضر، رفتار استاتیکی و دینامیکی میکرو/نانوتیر دوسرگیردار نیمه متأثر موردبررسی قرارگرفته و اثرات ناشی از جابه جایی موقعیت و طول الکترود زیرلایه مطالعه شده است. معادلات حرکت غیرخطی اویلر-برنولی و شرایط مرزی متناظر با آن، مبتنی بر تئوری غیرکلاسیک تنش مزدوج اصلاح شده به‌دست آمده اند. برای حل معادلات دیفرانسیل از روش حل عددی المان محدود بهره برده شده است. دقت روش المان محدود مورداستفاده از طریق مقایسه با نتایج به‌دست آمده پژوهش‌های پیشین اعتبارسنجی شده است و تطابق خوبی بین نتایج مشاهده شد. نتایج نشان‌دهنده این هستند که با کاهش طول الکترود زیرلایه، مقدار ولتاژ و نیروی موئینگی نهایی افزایش می‌یابد. کاهش طول الکترود زیرلایه باعث کاهش اندکی در جابه جایی نهایی می‌شود. در نهایت، یک پارامتر جدید متعادل کننده اثر اندازه-نیروی موئینگی برای نانوتیرها معرفی خواهد شد که باعث تغییر رفتار نانوتیر می‌گردد.

کلیدواژه‌ها

موضوعات


عنوان مقاله [English]

Static and Dynamic Pull-in Instabilities Analysis of Partially Affected Clamped Nano Actuators: The Substrate Effect

نویسندگان [English]

  • A. Noghrehabadi 1
  • A. Haghparast 1
  • M. Ghalambaz 2
1 Department of Mechanical Engineering, Shahid Chamran University, Ahvaz, Iran
2 Department of Mechanical Engineering, Dezful Branch, Islamic Azad University, Dezful, Iran
چکیده [English]

Many researches have been carried out for modeling of micro/nano electromechanical systems instabilities, in which both movable and substrate electrodes are at the same size; however, there is no research considering the static and dynamic pull-in instabilities of micro/nano actuators with a smaller substrate electrode in the presence of small size effects. In the present study, the static and dynamic behaviors of partially affected clamped micro/nano actuators are investigated and the effects of position and length of the substrate electrode are analyzed. The non-linear Euler-Bernoulli governing equation of the beam motion and the corresponding boundary conditions are derived using the Modified couple stress theory. Finite element method is utilized to solve the governing equations. In order to investigate the accuracy of the utilized finite element method, the obtained results are compared with those available in the literature and a good agreement between them was found. The results demonstrate that a decrease of the substrate electrode length leads to an increase of the required pull-in voltage and the pull-in capillary force. Moreover, a small reduction in the pull-in deflection of the nano-beam is observed because of the decrease of the substrate electrode. Finally, a new parameter, named as balanced size effect-capillary force which changes the trend of the behavior of the nano-beam, is introduced.

کلیدواژه‌ها [English]

  • Nano-beam
  • Clamped-clamped beam
  • Partially affected
  • Modified Couple Stress Theory
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