Design and Simulation of a Dual-State Quartz Resonator Force Sensor

Document Type : Research Article

Author

mechanical engineering department/faculty of engineering/ Zanjan University

Abstract

Quartz crystal is a piezoelectric material which is used as the sensing element in resonator load cells and temperature sensors. In the resonator force sensors, upon force-frequency effect, the resonance frequency of the quartz crystal is changed when the crystal is subjected to external forces. The amount of frequency shift depends on the temperature of the crystal. In this article, a new quartz resonator force sensor is designed and simulated. The sensor is working based on the force[1]frequency effect and has two working states with different loading conditions. At the first state, the force sensitivity of the sensor is maximum, and at the second loading state, the temperature effect on the force sensitivity may be minimum. The frequency shift of the load sensor is calculated by the combination of the mathematical modelling and finite element method. The simulations are performed at a temperature range of (0-100 °C). The effect of force azimuth angles and the length of flats of the resonator disk on the force sensitivity and temperature error of the sensitivity are evaluated. The designed double state sensor gives us the opportunity to increase the resolution and precision of force measurement at room temperature, and reduce the thermal error at other temperatures.

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References

[1]       R. Langdon, Resonator sensors-a review, Journal of Physics E: Scientific Instruments, 18(2) (1985) 103.
[2]       J. Ratajski, Force-frequency coefficient of singly rotated vibrating quartz crystals, IBM Journal of Research and Development, 12(1) (1968) 92-99.
[3]       D.L. Hammond, A. Benjaminson, The crystal resonator-a digital transducer, IEEE spectrum, 6(4) (1969) 53-58.
[4]       E. EerNisse, J. Paros, Practical considerations for miniature quartz resonator force transducers, QUARTEX INC SALT LAKE CITY UT, 1983.
[5]       R.G. Kirman, R.M. Langdon, Force sensors, in, Google Patents, 1986.
[6]       Y. Amand, J.-P. Peghaire, Vibrating beam forcefrequency transducer, in, Google Patents, 1996.
[7]       C. Gehin, C. Barthod, Y. Teisseyre, Design and characterisation of a new force resonant sensor, Sensors and Actuators A: Physical, 84(1-2) (2000) 65-69.
[8]       J.P. Corbett, Oscillating crystal force transducer system, in, Google Patents, 1970.
[9]       B. Dulmet, R. Bourquin, N. Shibanova, Frequencyoutput force sensor using a multimode doubly rotated quartz resonator, Sensors and Actuators A: Physical, 48(2) (1995) 109-116.
[10]    Z. Wang, H. Zhu, Y. Dong, G. Feng, Off-centre loadinsensitive digital quartz resonator force sensor, IEE Proceedings-Science, Measurement and Technology, 148(5) (2001) 215-220.
[11]    Z. Wang, H. Zhu, Y. Dong, G. Feng, A thicknessshear quartz resonator force sensor with dual-mode temperature compensation, IEEE sensors journal, 3(4) (2003) 490-496.
[12]    A. Asakura, T. Fukuda, F. Arai, Design, fabrication and characterization of compact force sensor using ATcut quartz crystal resonators, in: Intelligent Robots and Systems, 2008. IROS 2008. IEEE/RSJ International Conference on, IEEE, 2008, pp. 506-511.
[13]    Y. Murozaki, F. Arai, Wide range load sensor using quartz crystal resonator for detection of biological signals, IEEE Sensors journal, 15(3) (2015) 19131919.
[14] Y. Murozaki, S. Sakuma, F. Arai, Improvement of the Measurement Range and Temperature Characteristics of  a Load Sensor Using a Quartz Crystal Resonator with All Crystal Layer Components, Sensors, 17(5) (2017) 1067.
[15]       T.T. Pham, H. Zhang, S. Yenuganti, S. Kaluvan, J.A. Kosinski, Design, Modeling, and Experiment of a Piezoelectric Pressure Sensor Based on a Thickness-Shear-Mode Crystal Resonator, IEEE Transactions on Industrial Electronics, 64(11) (2017) 8484-8491.
[16]       F. Chen, J. Gao, W. Tian, Force-frequency characteristics of multi-electrode quartz crystal resonator cluster, Sensors and Actuators A: Physical, 269 (2018) 427-434.
[17]       M. Mohammadi, H. Daneshpajooh, M. Hamedi, Effect of anisotropy and piezoelectricity on the forcefrequency coefficient of AT-cut quartz crystals, Scientia Iranica. Transaction B, Mechanical Engineering, 23(5) (2016) 2203.
[18]       C.R. Dauwalter, The temperature dependence of the force sensitivity of AT-cut quartz crystals, in:  26th Annual Symposium on Frequency Control. 1972, IEEE, 1972, pp. 108-112.
[19]       P. Lee, Y. Wang, X. Markenscoff, High− frequency vibrations of crystal plates under initial stresses, The Journal of the Acoustical Society of America, 57(1) (1975) 95-105.
[20]       M. Mohammadi, M. Hamedi, H. Daneshpajooh, High-frequency vibrations of quartz crystals subject to initial thermo-mechanical bias, Scientia Iranica. Transaction B, Mechanical Engineering, 24(2 ((2017 (684-697.
[21]       H. Zhang, J.A. Turner, J. Yang, J.A. Kosinski, Force–frequency effect of thickness mode langasite resonators, Ultrasonics, 50(4-5) (2010) 479-490.
[22]       M.S. Patel, Nonlinear behavior in quartz resonators and its stability, Rutgers University-Graduate SchoolNew Brunswick, 2008.
[23]    E.P. Eernisse, Temperature dependence of the force frequency effect for the AT-, FC-, SC-, and rotated X-cuts, in:  34th Annual Symposium on Frequency Control. 1980, IEEE, 1980, pp. 426-430.
 
Amirkabir Journal of Mechanical Engineering
Volume 52, Issue 5
August 2020
Pages 1273-1284

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