Investigation of Quality Factor for Linear Vibrations of Rectangular Micro-plates with Thermoelastic Damping

Document Type : Research Article

Authors

1 Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran

2 mechanical engineering department, Shahid Nikbakht engineering faculty, university of Sistan and baluchestan, Zahedan, Iran

3 Head of Department of Mechanical Engineering Research Laboratory of Renewable Energies and Electromagnetic Fluids, Department of Mechanical Engineering, University of Sistan and Baluchestan, Zahedan, Iran

4 Department of mechanical engineering, University of Sistan and Baluchestan, Zahedan, Iran

Abstract

Regarding the necessity of obtaining high-quality resonators in micro-electromechanical systems, recognizing and investigating the parameters that affect the quality factor of micro-structures are essential and inevitable. Thermoelastic damping is a dominant source of damping which has a considerable effect on the quality factor. In micro-electromechanical systems, microplates are used as resonators and radio frequency filters and so on. In this paper, the effect of thermoelastic damping, which is one of the most important factors affecting the quality factor, has been investigated for rectangular micro-plates. The micro-plate is subjected to an electrostatic actuation. Galerkin method has been used to simplify and solve the governing equations. The result is a nonlinear algebraic equation for the quality factors of microplates of general conditions due to thermoelastic damping. Unlike previous researches, the proposed model can directly calculate the quality factor and there is no need of calculating undamped natural frequency. COMSOL multiphysics software is used for finite element simulation. After verification of the proposed model, the effect of various parameters on the quality factor is investigated. The proposed model can also be used to calculate the pull-in instability voltage. The results of the current paper can be used to design micro-electromechanical systems.

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References

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Amirkabir Journal of Mechanical Engineering
Volume 53, Issue 2
May 2021
Pages 851-862

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