آنالیز حساسیت کلی پارامترهای نانوماشینکاری با استفاده از میکروسکوپ روبشی حرارتی دینامیکی

نوع مقاله : مقاله پژوهشی

نویسندگان

گروه مهندسی مکانیک، واحد تبریز، دانشگاه آزاد اسلامی، تبریز، ایران

چکیده

در این تحقیق آنالیز حساسیت کلی پارامترهای نانوماشینکاری با استفاده از میکروسکوپ روبشی حرارتی دینامیکی مورد مطالعه قرار می‌گیرد. بدین منظور مقطع یک نمونه نانوماشینکاری‌شده با جاروب‌کردن تیپ با شعاع‌های مختلف بر روی پاسخ ارتعاشی کل سیستم در سرعت‌ و دماهای متفاوت شبیه سازی می‌شود. نشان داده می‌شود که با افزایش دما، عمق نانوماشینکاری کاهش و با افزایش شعاع تیپ، عمق نانوماشینکاری افزایش می‌یابد. همچنین اظهار می‌گردد که با افزایش سرعت حرکت پروب، صافی سطح نهایی نانوماشینکاری کاهش می‌یابد. سپس شاخص‌های سوبول برای میانگین عمق و صافی سطح نهایی نانوماشینکاری مورد بررسی قرار می‌گیرد. نشان داده می‌شود که، بر روی میانگین عمق نانوماشینکاری تنها دما و شعاع تیپ اثر داشته و اثرات سرعت حرکت پروب و برهمکنش بین پارامترها ناچیز می‌باشد. همچنین اظهار می‌شود، علاوه بر تاثیر قابل‌توجه هر 3 پارامتر بر روی صافی سطح نهایی نانوماشینکاری، برهمکنش بین این پارامترها بسیار اثرگذار می‌باشد. سپس شاخص‌های کل و شاخص‌های سوبول با یکدیگر مقایسه می‌گردند. بیان می‌شود، میزان شاخص‌های کل نسبت به شاخص‌های سوبول در رابطه با صافی سطح نهایی نانوماشینکاری به طور قابل‌توجهی بیشتر می‌باشد. در رابطه با میانگین عمق نانوماشینکاری، شاخص‌های کل و شاخص‌های سوبول برای دو پارامتر دما و شعاع تیپ تقریباً با هم برابرند و اثرات سرعت حرکت پروب بر روی عمق نانوماشینکاری بسیار ناچیز می‌باشد.
 

کلیدواژه‌ها

موضوعات


عنوان مقاله [English]

Global sensitivity analysis of nanomachining parameters by using dynamic scanning thermal microscope

نویسندگان [English]

  • Shahin N. Toossi
  • Kaveh E. Torkanpouri
Department of Mechanical Engineering, Tabriz Branch, Islamic Azad University, Tabriz, Iran
چکیده [English]

In this study, global sensitivity analysis of nanomachining parameters by using a dynamic scanning thermal microscope is investigated. Thus, the cross-section of a nanomachined sample by sweeping with different tip radius on the vibrational response of the system at different speeds and temperatures are simulated. It is shown that by increasing temperature, the depth of nanomachining decreases, and by increasing tip radius, the depth of nanomachining increases. Also, it is declared that the final quality of the nanomachining decreases by increasing speed traveling. Then, the Sobol indices for the mean depth and surface finish of the nanomachined sample are studied. It is shown that traveling speed is not affected the mean depth of nanomachining in its physical range and so the effects of the probe traveling speed and interaction between parameters are negligible. It is declared that the effect of interaction between temperature, traveling speed and tip radius is important on the final surface finish of the sample, however, the most important parameter is still the temperature difference. Then, the total indices and Sobol indices are compared. It is stated that the total indices are significantly higher than the Sobol indices for the final surface of ​​the nanomachining. For the mean depth of the nanomachining the total indices and Sobol indices for temperature and tip radius are approximately equal and the effect of probe traveling speed is negligible.

کلیدواژه‌ها [English]

  • Global Sensitivity Analysis
  • Base Excitation
  • Thermal Vibration
  • Nanomachining
  • Scanning thermal microscope
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