Vertical growth of titanium dioxide nanorods on nebulizer fluorine doped tin oxide deposited on silicon microarrays

Document Type : Research Article

Authors

Faculty of New Sciences and Technologies, University of Tehran

Abstract

In this paper, fluorine doped tin oxide layers are created as electrodes and seeds for the growth of titanium dioxide nanorods by spray pyrolysis coating based on silicon microarrays. The coating of this layer on the fluorine-contaminated tin oxide layer is of great importance for the fabrication of nanogenerators based on barium titanate. In this paper, two methods nebulizer and hydrothermal have been used. The effect of coating temperature as well as nebulizer volume on the surface resistance of the layers has been investigated by four-point probe device. Also, the samples were subjected to identical hydrothermal conditions for the growth of nanorods and the morphology of nanostructures grown on fabricated layers by scanning electron microscope has been investigated.  The adhesion of the layers is also very important in this area and has been studied as one of the important parameters in the hydrothermal process. The results show that with this method, nanorods have grown on the side walls of the micro-machining structure, which can increase the quality of devices based on these structures. In this paper, low surface authorities up to 11 Ω / cm2 were achieved using the nebulizer method.
 

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References

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Amirkabir Journal of Mechanical Engineering
Volume 53, Issue 6 (Special Issue)
September 2021
Pages 4051-4062

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